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2005-10-21 19:57 |
Refractive projection objective（折射投影物鏡）--版主繼續(xù)革命�。�
Abstract n0O- Bxhl
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. HkJ$r<J2
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) s4;SA
Correspondence Name and Address: SUGHRUE MION, PLLC Z?G-~3]e
2100 PENNSYLVANIA AVENUE, N.W. H ~J#!3
SUITE 800 "^zxq5u
WASHINGTON YX18!OhQ
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20037 e}(ws~.
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Assignee Name and Adress: CARL ZEISS SMT AG b0tr)>d
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Serial No.: 931051 )+N%!(ki
Series Code: 10 _&.CI6
Filed: September 1, 2004 Ts|& _|
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